by Dan | Nov 2, 2020 | Analysis
The parallel plate form of a MEMS electrostatic actuator (Fig. 1) has the dynamics, md2y(t) + ?b1 + b2y2(t)? dy(t) + k1y(t) + k3y3(t) = εAV 2(t) dt2 dt 2 (g0 − y(t))2 y(t) and its derivatives and V (t) are functions of time. m, b1, b3, k1, k3, ε, A, and g0 non-zero...
